Jerome Doutriaux, Abrahim Lavi. An Evolutionary Approach to Process Control with Application to Lithography. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 4(2):176-185, 1974. [doi]
@article{DoutriauxL74,
title = {An Evolutionary Approach to Process Control with Application to Lithography},
author = {Jerome Doutriaux and Abrahim Lavi},
year = {1974},
doi = {10.1109/TSMC.1974.5409112},
url = {http://dx.doi.org/10.1109/TSMC.1974.5409112},
researchr = {https://researchr.org/publication/DoutriauxL74},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
volume = {4},
number = {2},
pages = {176-185},
}