Jun Du, Zhengying Wei, Wei He, Yiping Tang. Numerical analysis of impact of imprinting pressure on profile shape and mold deformation in UV-NIL. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 792-795, IEEE, 2011. [doi]
@inproceedings{DuWHT11,
title = {Numerical analysis of impact of imprinting pressure on profile shape and mold deformation in UV-NIL},
author = {Jun Du and Zhengying Wei and Wei He and Yiping Tang},
year = {2011},
doi = {10.1109/NEMS.2011.6017473},
url = {http://dx.doi.org/10.1109/NEMS.2011.6017473},
researchr = {https://researchr.org/publication/DuWHT11},
cites = {0},
citedby = {0},
pages = {792-795},
booktitle = {6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011},
publisher = {IEEE},
}