Design, fabrication and characterization of a high performance MEMS accelerometer - researchr publication authors

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Fatemeh Edalatfar, Bahareh Yaghootkar, Abdul Qader Ahsan Qureshi, Soheil Azimi, Behraad Bahreyni. Design, fabrication and characterization of a high performance MEMS accelerometer. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

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