Energy monitoring of high dose ion implantation in semiconductors via photocurrent measurement

Christoph Eichenseer, Gerhard Pöppel, Thomas Mikolajick. Energy monitoring of high dose ion implantation in semiconductors via photocurrent measurement. Microelectronics Reliability, 55(9-10):1369-1372, 2015. [doi]

Authors

Christoph Eichenseer

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Gerhard Pöppel

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Thomas Mikolajick

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