Gary Elko, Flavio Pardo, Daniel López, David Bishop, Peter Gammel. Capacitive MEMS microphones. Bell Labs Technical Journal, 10(3):187-198, 2005. [doi]
@article{ElkoPLBG05,
title = {Capacitive MEMS microphones},
author = {Gary Elko and Flavio Pardo and Daniel López and David Bishop and Peter Gammel},
year = {2005},
doi = {10.1002/bltj.20113},
url = {http://dx.doi.org/10.1002/bltj.20113},
researchr = {https://researchr.org/publication/ElkoPLBG05},
cites = {0},
citedby = {0},
journal = {Bell Labs Technical Journal},
volume = {10},
number = {3},
pages = {187-198},
}