Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity

Yomna M. Eltagoury, Mostafa Soliman, Yasser M. Sabry, Mohammed Alotaibi, Diaa Khalil. Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity. Micromachines, 7(10):188, 2016. [doi]

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