Sub-10 nm Multi-Nano-Pillar Type Vertical MOSFET

Tetsuo Endoh, Koji Sakui, Yukio Yasuda. Sub-10 nm Multi-Nano-Pillar Type Vertical MOSFET. IEICE Transactions, 93-C(5):557-562, 2010. [doi]

@article{EndohSY10a,
  title = {Sub-10 nm Multi-Nano-Pillar Type Vertical MOSFET},
  author = {Tetsuo Endoh and Koji Sakui and Yukio Yasuda},
  year = {2010},
  url = {http://search.ieice.org/bin/summary.php?id=e93-c_5_557},
  researchr = {https://researchr.org/publication/EndohSY10a},
  cites = {0},
  citedby = {0},
  journal = {IEICE Transactions},
  volume = {93-C},
  number = {5},
  pages = {557-562},
}