A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Antoine Ferreira, Sumeet S. Aphale. A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 41(3):350-364, 2011. [doi]

@article{FerreiraA11,
  title = {A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems},
  author = {Antoine Ferreira and Sumeet S. Aphale},
  year = {2011},
  doi = {10.1109/TSMCC.2010.2072779},
  url = {http://dx.doi.org/10.1109/TSMCC.2010.2072779},
  tags = {control systems, modeling, survey},
  researchr = {https://researchr.org/publication/FerreiraA11},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
  volume = {41},
  number = {3},
  pages = {350-364},
}