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Spline Interpolation-Based Multi-Scale Model for Etching in a Chlorine-Argon Inductively Coupled Plasma

Lado Filipovic, Tobias Reiter. Spline Interpolation-Based Multi-Scale Model for Etching in a Chlorine-Argon Inductively Coupled Plasma. In Winter Simulation Conference, WSC 2024, Orlando, FL, USA, December 15-18, 2024. pages 1907-1918, IEEE, 2024. [doi]

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Lado Filipovic

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Tobias Reiter

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