Samara L. Firebaugh, Harry K. Charles Jr., R. L. Edwards, A. C. Keeney, S. F. Wilderson. Optical deflection measurement for characterization of microelectromechanical systems (MEMS). IEEE T. Instrumentation and Measurement, 53(4):1047-1051, 2004. [doi]
@article{FirebaughCEKW04,
title = {Optical deflection measurement for characterization of microelectromechanical systems (MEMS)},
author = {Samara L. Firebaugh and Harry K. Charles Jr. and R. L. Edwards and A. C. Keeney and S. F. Wilderson},
year = {2004},
doi = {10.1109/TIM.2004.831504},
url = {http://dx.doi.org/10.1109/TIM.2004.831504},
tags = {C++},
researchr = {https://researchr.org/publication/FirebaughCEKW04},
cites = {0},
citedby = {0},
journal = {IEEE T. Instrumentation and Measurement},
volume = {53},
number = {4},
pages = {1047-1051},
}