Sensor-less Vibration Suppression and Scan Compensation for Piezoelectric Tube Nanopositioners

Andrew J. Fleming, S. O. Reza Moheimani. Sensor-less Vibration Suppression and Scan Compensation for Piezoelectric Tube Nanopositioners. In 44th IEEE IEEE Conference on Decision and Control and 8th European Control Conference Control, CDC/ECC 2005, Seville, Spain, 12-15 December, 2005. pages 1162-1167, IEEE, 2005. [doi]

Authors

Andrew J. Fleming

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S. O. Reza Moheimani

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