Andreas H. Foitzik, Wolfgang Kaese, Thomas Vogt, Michael Sommerer, Serguei Arkhipov. Static And Dynamic Characterization Of Mems Via ESPI. International Journal of Computational Engineering Science, 4(3):467-470, 2003. [doi]
@article{FoitzikKVSA03,
title = {Static And Dynamic Characterization Of Mems Via ESPI},
author = {Andreas H. Foitzik and Wolfgang Kaese and Thomas Vogt and Michael Sommerer and Serguei Arkhipov},
year = {2003},
doi = {10.1142/S1465876303001538},
url = {http://dx.doi.org/10.1142/S1465876303001538},
researchr = {https://researchr.org/publication/FoitzikKVSA03},
cites = {0},
citedby = {0},
journal = {International Journal of Computational Engineering Science},
volume = {4},
number = {3},
pages = {467-470},
}