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Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction

Yoshiro Fukui, Yusuke Murayama. Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction. In 62nd Annual Conference of the Society of Instrument and Control Engineers, SICE 2023, Tsu, Japan, September 6-9, 2023. pages 730-735, IEEE, 2023. [doi]

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Yoshiro Fukui

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Yusuke Murayama

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