Dimitri Galayko, Andreas Kaiser, Lionel Buchaillot, Dominique Collard, Chantal Combi. Electrostatical coupling-spring for micro-mechanical filtering applications. In ISCAS (3). pages 530-533, 2003. [doi]
@inproceedings{GalaykoKBCC03,
title = {Electrostatical coupling-spring for micro-mechanical filtering applications},
author = {Dimitri Galayko and Andreas Kaiser and Lionel Buchaillot and Dominique Collard and Chantal Combi},
year = {2003},
doi = {10.1109/ISCAS.2003.1205073},
url = {http://dx.doi.org/10.1109/ISCAS.2003.1205073},
researchr = {https://researchr.org/publication/GalaykoKBCC03},
cites = {0},
citedby = {0},
pages = {530-533},
booktitle = {ISCAS (3)},
}