TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement - researchr publication authors

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Manu Garg, Fang-Wei Tsai, Khanjan Joshi, Yi Chiu, Pushpapraj Singh. TiN-C Based CMOS MEMS Pirani Gauge for on-Chip Pressure Measurement. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

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