A reduced order model based manifold technique for automated defect judging, Application to structural holes

Chady Ghnatios, Alexios Rustom, Ghazi Asmar, Elie Chakar. A reduced order model based manifold technique for automated defect judging, Application to structural holes. In 29th International Conference on Microelectronics, ICM 2017, Beirut, Lebanon, December 10-13, 2017. pages 1-4, IEEE, 2017. [doi]

Authors

Chady Ghnatios

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Alexios Rustom

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Ghazi Asmar

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Elie Chakar

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