Signal integrity in capacitive and piezoresistive single- and multi-axis MEMS gyroscopes under vibrations

Federico Giacci, Stefano Dellea, Giacomo Langfelder. Signal integrity in capacitive and piezoresistive single- and multi-axis MEMS gyroscopes under vibrations. Microelectronics Reliability, 75:59-68, 2017. [doi]

@article{GiacciDL17,
  title = {Signal integrity in capacitive and piezoresistive single- and multi-axis MEMS gyroscopes under vibrations},
  author = {Federico Giacci and Stefano Dellea and Giacomo Langfelder},
  year = {2017},
  doi = {10.1016/j.microrel.2017.06.019},
  url = {https://doi.org/10.1016/j.microrel.2017.06.019},
  researchr = {https://researchr.org/publication/GiacciDL17},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {75},
  pages = {59-68},
}