ΣΔ Effects and Charge Locking in Capacitive MEMS Under Dielectric Charge Control

Panagiotis Giounanlis, Sergi Gorreta, Manuel Domínguez Pumar, Joan Pons-Nin, Orla Feely, Elena Blokhina. ΣΔ Effects and Charge Locking in Capacitive MEMS Under Dielectric Charge Control. IEEE Trans. on Circuits and Systems, 64-II(2):206-210, 2017. [doi]

Authors

Panagiotis Giounanlis

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Sergi Gorreta

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Manuel Domínguez Pumar

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Joan Pons-Nin

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Orla Feely

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Elena Blokhina

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