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SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding

Henrik Gradin, Stefan Braun, Göran Stemme, Wouter van der Wijngaart. SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding. IEEE Transactions on Industrial Electronics, 59(12):4895-4906, 2012. [doi]

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Henrik Gradin

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Stefan Braun

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Göran Stemme

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Wouter van der Wijngaart

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