Design and simulation of corrugated diaphragm applied to the MEMS fiber optic pressure sensor - researchr publication authors

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Yiming Gui, Yangxi Zhang, Guandong Liu, Yilong Hao, Chengchen Gao. Design and simulation of corrugated diaphragm applied to the MEMS fiber optic pressure sensor. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 152-155, IEEE, 2016. [doi]

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