D. V. Santhosh Kumar Gunapu, Jose Joseph, Shiv Govind Singh, Siva Rama Krishna Vanjari. Selective Anisotropic Dry Etching of Piezoelectric Silk Microstructures Using Oxygen Plasma Ashing. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]
@inproceedings{GunapuJSV18,
title = {Selective Anisotropic Dry Etching of Piezoelectric Silk Microstructures Using Oxygen Plasma Ashing},
author = {D. V. Santhosh Kumar Gunapu and Jose Joseph and Shiv Govind Singh and Siva Rama Krishna Vanjari},
year = {2018},
doi = {10.1109/ICSENS.2018.8589957},
url = {https://doi.org/10.1109/ICSENS.2018.8589957},
researchr = {https://researchr.org/publication/GunapuJSV18},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018},
publisher = {IEEE},
isbn = {978-1-5386-4707-3},
}