Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units

Bashar Haddad, Sen Yang, Lina J. Karam, Jieping Ye, Nital S. Patel, Martin W. Braun. Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units. IEEE T. Automation Science and Engineering, 15(1):145-159, 2018. [doi]

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