LPCVD-silicon oxynitride films: interface properties

E. Halova, S. Alexandrova, A. Szekeres, M. Modreanu. LPCVD-silicon oxynitride films: interface properties. Microelectronics Reliability, 45(5-6):982-985, 2005. [doi]

Authors

E. Halova

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S. Alexandrova

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A. Szekeres

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M. Modreanu

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