Design and control of an air-bearing supported three degree-of-freedom fine positioner - researchr publication authors

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Robert Hammer, Ralph L. Hollis, C. H. An, F. Henriks. Design and control of an air-bearing supported three degree-of-freedom fine positioner. In Proceedings of the 1992 IEEE International Conference on Robotics and Automation, Nice, France, May 12-14, 1992. pages 677-684, IEEE, 1992. [doi]

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