Xuesong Han. Investigation of Surface Integrity in the Case of Chemical Mechanical Polishing Silicon Wafer by Molecular Dynamics Simulation Method. In Zhigeng Pan, Adrian David Cheok, Michael Haller, Rynson W. H. Lau, Hideo Saito, Ronghua Liang, editors, Advances in Artificial Reality and Tele-Existence, 16th International Conference on Artificial Reality and Telexistence, ICAT 2006, Hangzhou, China, November 29 - December 1, 2006, Proceedings. Volume 4282 of Lecture Notes in Computer Science, pages 651-659, Springer, 2006. [doi]
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