A CMOS-MEMS piezoresistive accelerometer with large proof mass

M. Haris, Hongwei Qu. A CMOS-MEMS piezoresistive accelerometer with large proof mass. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 309-312, IEEE, 2010. [doi]

Authors

M. Haris

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Hongwei Qu

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