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Improvement of sensitivity of force sensor probe using quartz crystal resonator

Noriaki Hasegawa, Shinya Sakuma, Ayaka Sato, Fumihito Arai. Improvement of sensitivity of force sensor probe using quartz crystal resonator. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016, Nagoya, Japan, November 28-30, 2016. pages 1-3, IEEE, 2016. [doi]

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