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Development of a Microelectromechanical System (MEMS)-Based Multisensor Platform for Environmental Monitoring

Mathieu Hautefeuille, Brendan O'Flynn, Frank H. Peters, Conor O'Mahony. Development of a Microelectromechanical System (MEMS)-Based Multisensor Platform for Environmental Monitoring. Micromachines, 2(4):410-430, 2011. [doi]

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