Rectangular Amplitude Mask-Based Auto-Focus Method with a Large Range and High Precision for a Micro-LED Wafer Defects Detection System

Wenjun He, YuFeng Ma, Wenbo Wang. Rectangular Amplitude Mask-Based Auto-Focus Method with a Large Range and High Precision for a Micro-LED Wafer Defects Detection System. Sensors, 23(17):7579, September 2023. [doi]

@article{HeMW23-0,
  title = {Rectangular Amplitude Mask-Based Auto-Focus Method with a Large Range and High Precision for a Micro-LED Wafer Defects Detection System},
  author = {Wenjun He and YuFeng Ma and Wenbo Wang},
  year = {2023},
  month = {September},
  doi = {10.3390/s23177579},
  url = {https://doi.org/10.3390/s23177579},
  researchr = {https://researchr.org/publication/HeMW23-0},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {23},
  number = {17},
  pages = {7579},
}