Allan Hilton, Dorota S. Temple. Wafer-Level Vacuum Packaging of Smart Sensors. Sensors, 16(11):1819, 2016. [doi]
@article{HiltonT16,
title = {Wafer-Level Vacuum Packaging of Smart Sensors},
author = {Allan Hilton and Dorota S. Temple},
year = {2016},
doi = {10.3390/s16111819},
url = {http://dx.doi.org/10.3390/s16111819},
researchr = {https://researchr.org/publication/HiltonT16},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {16},
number = {11},
pages = {1819},
}