Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter

Akira Hirabayashi. Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter. IEICE Transactions, 93-A(2):542-549, 2010. [doi]

@article{Hirabayashi10,
  title = {Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter},
  author = {Akira Hirabayashi},
  year = {2010},
  url = {http://search.ieice.org/bin/summary.php?id=e93-a_2_542},
  researchr = {https://researchr.org/publication/Hirabayashi10},
  cites = {0},
  citedby = {0},
  journal = {IEICE Transactions},
  volume = {93-A},
  number = {2},
  pages = {542-549},
}