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Artificial Intelligence in Semiconductor Manufacturing for Process Development, Functional Diagnostics, and Yield Crash Prevention

Mary C. Murphy Hoye. Artificial Intelligence in Semiconductor Manufacturing for Process Development, Functional Diagnostics, and Yield Crash Prevention. In Proceedings International Test Conference 1986, Washington, D.C., USA, September 1986. pages 939-946, IEEE Computer Society, 1986.

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Mary C. Murphy Hoye

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