A two-phase non-dominated sorting particle swarm optimization for chip feature design to improve wafer exposure effectiveness

Chia-Yu Hsu, Shih-Chang Chiu. A two-phase non-dominated sorting particle swarm optimization for chip feature design to improve wafer exposure effectiveness. Computers & Industrial Engineering, 147:106669, 2020. [doi]

@article{HsuC20-1,
  title = {A two-phase non-dominated sorting particle swarm optimization for chip feature design to improve wafer exposure effectiveness},
  author = {Chia-Yu Hsu and Shih-Chang Chiu},
  year = {2020},
  doi = {10.1016/j.cie.2020.106669},
  url = {https://doi.org/10.1016/j.cie.2020.106669},
  researchr = {https://researchr.org/publication/HsuC20-1},
  cites = {0},
  citedby = {0},
  journal = {Computers & Industrial Engineering},
  volume = {147},
  pages = {106669},
}