Improved PID algorithms with application to excimer laser temperature control

Mingqing Hu, Xiaoquan Han, Zebing Feng, Yi Zhou, Weihu Zhou, Lujun Bai, Bing Li. Improved PID algorithms with application to excimer laser temperature control. In 2nd International Conference on Systems and Informatics, ICSAI 2014, 15-17 November 2014, Wistaria Hotel, Shanghai, China. pages 84-88, IEEE, 2014. [doi]

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