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Toward on-demand wafer fab simulation using formal structure & behavior models

Edward Huang, Ky Sang Kwon, Leon F. McGinnis. Toward on-demand wafer fab simulation using formal structure & behavior models. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2341-2349, WSC, 2008. [doi]

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Edward Huang

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Ky Sang Kwon

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Leon F. McGinnis

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