Reduced dimensional analysis on dynamic characteristics of microcantilever beams in the fluid environment and application to atomic force microscopy

Kuan-Rong Huang, Zhan-Yi Liao, Jeng-Shian Chang, S. D. Chao, Kuang-Chong Wu, Shyh-Haur Chen. Reduced dimensional analysis on dynamic characteristics of microcantilever beams in the fluid environment and application to atomic force microscopy. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 471-474, IEEE, 2011. [doi]

Authors

Kuan-Rong Huang

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Zhan-Yi Liao

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Jeng-Shian Chang

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S. D. Chao

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Kuang-Chong Wu

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Shyh-Haur Chen

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