A Surface Micromachined CMOS MEMS Humidity Sensor

Jian-qiu Huang, Fei Li, Min Zhao, Kai Wang. A Surface Micromachined CMOS MEMS Humidity Sensor. Micromachines, 6(10):1569-1576, 2015. [doi]

Authors

Jian-qiu Huang

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Fei Li

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Min Zhao

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Kai Wang

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