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The smart humidity detection using the interdigitated IGZO thin film

Chien-Sheng Huang, Hsin-Feng Miao, Ze-Lin Lian, Tsung-Han Chan, Jenn-Kaie Lain. The smart humidity detection using the interdigitated IGZO thin film. In IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2022, Taipei, Taiwan, July 6-8, 2022. pages 493-494, IEEE, 2022. [doi]

Authors

Chien-Sheng Huang

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Hsin-Feng Miao

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Ze-Lin Lian

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Tsung-Han Chan

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Jenn-Kaie Lain

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