Automated visual inspection in the semiconductor industry: A survey

Szu-Hao Huang, Ying-Cheng Pan. Automated visual inspection in the semiconductor industry: A survey. Computers in Industry, 66:1-10, 2015. [doi]

@article{HuangP15,
  title = {Automated visual inspection in the semiconductor industry: A survey},
  author = {Szu-Hao Huang and Ying-Cheng Pan},
  year = {2015},
  doi = {10.1016/j.compind.2014.10.006},
  url = {http://dx.doi.org/10.1016/j.compind.2014.10.006},
  researchr = {https://researchr.org/publication/HuangP15},
  cites = {0},
  citedby = {0},
  journal = {Computers in Industry},
  volume = {66},
  pages = {1-10},
}