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Design and Implementation of a Micromechanical Silicon Resonant Accelerometer

Libin Huang, Hui Yang, Yang Gao, Liye Zhao, Jinxing Liang. Design and Implementation of a Micromechanical Silicon Resonant Accelerometer. Sensors, 13(11):15785-15804, 2013. [doi]

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Libin Huang

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Hui Yang

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Yang Gao

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Liye Zhao

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Jinxing Liang

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