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Performance assessment of virtual metrology in APC applications for the viability of sampling reductions

Keung Hui, Jason Mou. Performance assessment of virtual metrology in APC applications for the viability of sampling reductions. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 750-755, IEEE, 2014. [doi]

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Keung Hui

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Jason Mou

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