Applying Machine Learning to Semiconductor Manufacturing

Keki B. Irani, Jie Cheng, Usama M. Fayyad, Zhaogang Qian. Applying Machine Learning to Semiconductor Manufacturing. IEEE Intelligent Systems, 8(1):41-47, 1993. [doi]

@article{IraniCFQ93,
  title = {Applying Machine Learning to Semiconductor Manufacturing},
  author = {Keki B. Irani and Jie Cheng and Usama M. Fayyad and Zhaogang Qian},
  year = {1993},
  url = {http://csdl.computer.org/comp/mags/ex/1993/01/x1041abs.htm},
  tags = {machine learning},
  researchr = {https://researchr.org/publication/IraniCFQ93},
  cites = {0},
  citedby = {0},
  journal = {IEEE Intelligent Systems},
  volume = {8},
  number = {1},
  pages = {41-47},
}