Improvement of Removal Rate of Tape Lapping by Applying Fluid with Ultrasonic Excited Cavitation

Hiromi Isobe, Soutarou Tsuji, Keisuke Hara, Jun Ishimatsu. Improvement of Removal Rate of Tape Lapping by Applying Fluid with Ultrasonic Excited Cavitation. IJAT, 15(1):65-73, 2021. [doi]

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