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Development of a Microprobing System for Side Wall Detection Based on Local Surface Interaction Force Detection

So Ito, Yusuke Shima, Daichi Kato, Kimihisa Matsumoto, Kazuhide Kamiya. Development of a Microprobing System for Side Wall Detection Based on Local Surface Interaction Force Detection. IJAT, 14(1):91-98, 2020. [doi]

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