Tatsuya Iwata, Kyosuke Matsuda, Kazuhiro Takahashi, Kazuaki Sawada. 2 Stacked Structure with Micromachined Hotplates. Sensors, 17(9):2156, 2017. [doi]
@article{IwataMTS17,
title = {2 Stacked Structure with Micromachined Hotplates},
author = {Tatsuya Iwata and Kyosuke Matsuda and Kazuhiro Takahashi and Kazuaki Sawada},
year = {2017},
doi = {10.3390/s17092156},
url = {https://doi.org/10.3390/s17092156},
researchr = {https://researchr.org/publication/IwataMTS17},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {17},
number = {9},
pages = {2156},
}