Effect of argon plasma treatment on electronic properties of doped hydrogenated Silicon thin films for photovoltaic applications

Manmohan Jain, Sucheta Juneja, Kalpana Lodhi, Chander Kant, Sushil Kumar, Mohit Jain, Ateet Dutt, Yasuhiro Matsumoto. Effect of argon plasma treatment on electronic properties of doped hydrogenated Silicon thin films for photovoltaic applications. In CCE. pages 1-6, 2021. [doi]

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