Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator

Mohammad Tariq Jan, Farooq Ahmad, Nor Hisham Hamid, Mohd Haris M. Khir, Muhammad Shoaib, Khalid Ashraf. Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator. Microelectronics Reliability, 63:82-89, 2016. [doi]

@article{JanAHKSA16,
  title = {Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator},
  author = {Mohammad Tariq Jan and Farooq Ahmad and Nor Hisham Hamid and Mohd Haris M. Khir and Muhammad Shoaib and Khalid Ashraf},
  year = {2016},
  doi = {10.1016/j.microrel.2016.05.007},
  url = {http://dx.doi.org/10.1016/j.microrel.2016.05.007},
  researchr = {https://researchr.org/publication/JanAHKSA16},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {63},
  pages = {82-89},
}