Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning - researchr publication authors

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M. A. Jebri, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning. In 5th International Conference on Systems and Control, ICSC 2016, Marrakesh, Morocco, May 25-27, 2016. pages 169-174, IEEE, 2016. [doi]

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