Control strategies for thermal budget and temperature uniformity in spike rapid thermal processing systems

Jyh-Cheng Jeng, Wen-Chung Chen. Control strategies for thermal budget and temperature uniformity in spike rapid thermal processing systems. Computers & Chemical Engineering, 57:141-150, 2013. [doi]

Authors

Jyh-Cheng Jeng

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Wen-Chung Chen

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