Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine

S. Kalaiselvi, L. Sujatha, R. Sundar. Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Authors

S. Kalaiselvi

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L. Sujatha

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R. Sundar

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